JPS616707U - 微細形状測定器 - Google Patents

微細形状測定器

Info

Publication number
JPS616707U
JPS616707U JP8938384U JP8938384U JPS616707U JP S616707 U JPS616707 U JP S616707U JP 8938384 U JP8938384 U JP 8938384U JP 8938384 U JP8938384 U JP 8938384U JP S616707 U JPS616707 U JP S616707U
Authority
JP
Japan
Prior art keywords
measuring instrument
center
shape measuring
measured
fine shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8938384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338645Y2 (en]
Inventor
春樹 中川
Original Assignee
株式会社 小坂研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 小坂研究所 filed Critical 株式会社 小坂研究所
Priority to JP8938384U priority Critical patent/JPS616707U/ja
Publication of JPS616707U publication Critical patent/JPS616707U/ja
Application granted granted Critical
Publication of JPH0338645Y2 publication Critical patent/JPH0338645Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP8938384U 1984-06-18 1984-06-18 微細形状測定器 Granted JPS616707U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8938384U JPS616707U (ja) 1984-06-18 1984-06-18 微細形状測定器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8938384U JPS616707U (ja) 1984-06-18 1984-06-18 微細形状測定器

Publications (2)

Publication Number Publication Date
JPS616707U true JPS616707U (ja) 1986-01-16
JPH0338645Y2 JPH0338645Y2 (en]) 1991-08-15

Family

ID=30643406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8938384U Granted JPS616707U (ja) 1984-06-18 1984-06-18 微細形状測定器

Country Status (1)

Country Link
JP (1) JPS616707U (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6281950A (ja) * 1985-10-02 1987-04-15 Toyoda Autom Loom Works Ltd 低温環境で使用される車両用のパワーステアリング装置
JPH03113110U (en]) * 1990-03-06 1991-11-19
JP5938503B1 (ja) * 2015-08-24 2016-06-22 新東エスプレシジョン株式会社 測定装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6281950A (ja) * 1985-10-02 1987-04-15 Toyoda Autom Loom Works Ltd 低温環境で使用される車両用のパワーステアリング装置
JPH03113110U (en]) * 1990-03-06 1991-11-19
JP5938503B1 (ja) * 2015-08-24 2016-06-22 新東エスプレシジョン株式会社 測定装置
US9921401B2 (en) 2015-08-24 2018-03-20 Sinto S-Precision, Ltd. Measuring device with alignment and reference position for measurement object

Also Published As

Publication number Publication date
JPH0338645Y2 (en]) 1991-08-15

Similar Documents

Publication Publication Date Title
JPH06507706A (ja) 位置測定
JPS616707U (ja) 微細形状測定器
JPS62212507A (ja) レ−ザ干渉計で校正を不要とした触針式表面形状検出器
JP2890423B2 (ja) 光導波路の測定装置
JPS5866903A (ja) 光学素子微動機構
JP2926777B2 (ja) 形状計測装置
JPS6182209U (en])
Hallimond et al. An improved polarizing microscope IV. 1 The Fedorov Stage (Three-Axis)
JP2585035Y2 (ja) 光学式情報記録再生装置の光軸調整機構
JPH044167Y2 (en])
JP2002342945A (ja) 光ピックアップおよび光ピックアップの調整方法
JPS60211304A (ja) 平行度測定装置
JPH0333934Y2 (en])
JPS60137314U (ja) 広視野測距装置の調整機構
JPS6184508U (en])
JPH0441460Y2 (en])
JPH03147536A (ja) 光学ヘッド
KR20030043280A (ko) 근접장 광기록재생기의 광축조정장치, 조정방법
JPS5971432U (ja) 光デイスク用光学ヘツド
JPH0452819Y2 (en])
JPH0462509U (en])
JPH01287412A (ja) 測距装置
JPH01143026A (ja) フォーカス検出装置
JPS6082208U (ja) 被測定面の位置測定装置
JPH0510602B2 (en])